In recent years, MEMS inertial sensors have developed rapidly and their accuracy has been continuously improved. Although the accuracy is still far from that of fiber optic gyros and laser gyros, its low price, small size, and light weight make MEMS inertial navigation systems play an important role in inertial navigation systems. Subdivided according to accuracy, gyroscopes can be divided into commercial gyroscopes, tactical gyroscopes, navigation gyroscopes, and strategic gyroscopes. At this stage, the fastest market and technology development is MEMS gyroscopes, benefiting from the adoption of MEMS gyroscopes by smartphones, its market size has achieved huge growth. According to the analysis and prediction of the gyroscope in 2020 by the US Draper laboratory, in 2020, quartz/silicon microelectromechanical MEMS gyroscope will occupy the low- and medium-precision application fields, that is, consumer-level applications. The basic function is to measure the linear acceleration, tilt angle, rotation speed, vibration frequency and force of an object. These basic physical signals can be derived from various functions through the development of application programs.
In addition, although it is currently in the field of strategic high-precision applications (represented by the aerospace and defense fields), it is the world of fiber optic gyros. However, with the continuous development of MEMS material technology and manufacturing technology in the future, MEMS inertial sensors will develop towards light weight and miniaturization. The accuracy of MEMS inertial navigation systems will continue to increase and their costs will continue to decrease. Therefore, strategic high-precision MEMS gyroscopes are used Replacing fiber optic gyroscopes is an important development trend.
Nowadays, some high-precision MEMS inertial sensors are used in intelligent artillery shells, optical aiming and stabilization systems, underwater object navigation, aircraft attitude monitoring, battlefield robots, etc. It is also inevitable for guided weapon systems such as air defense missiles, anti-tank missiles, and portable missiles. select.
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