The yoke is composed of soft magnetic materials with low temperature coefficient and good magnetic permeability. The magnetic steel is processed with a grinder using permanent magnetic materials with good magnetic permeability.
The material of the flexible sheet is quartz glass with excellent temperature performance, and the shape is made by ultrasonic processing. The processing of the flexible element generally adopts the chemical etching method, or the reactive ion etching process can also be used to process the entire flexible sheet, but the cost is very high.
The amount of differential capacitance change caused by acceleration is detected by the differential capacitance detector in the servo circuit, and its output is current, which becomes the output voltage through the current integrator and then the voltage is converted into the output current by the transconductance compensation amplifier. The magnitude of this output current It is proportional to the input acceleration.
The quartz flexible acceleration sensor is a single-axis torque feedback accelerometer, which detects the acceleration signal of the outside world through the detection quality, and then is demodulated and amplified by the servo circuit, and finally the output current signal is proportional to the acceleration signal.
The performance index of the quartz flexible acceleration sensor has high measurement accuracy, good repeatability, high reliability, small size, light weight, wide voltage and low power consumption.
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