MEMS is short for Micro Electro Mechanical systems, or Micro Electro Mechanical systems. Micro-electromechanical systems (MEMS) technology is a 21st century frontier technology based on micro/nanotechnology, it is the technology of designing, processing, manufacturing, measuring and controlling micro/nano materials. It can be mechanical components, optical systems, driving components, electronic control system integrated into a whole unit of the micro system. The micro-electromechanical system can not only collect, process and send information or instructions, but also act autonomously or according to external instructions according to the acquired information. It USES a combination of microelectronic technology and micro-machining technology (including silicon body micro-machining, silicon surface micro-machining, LIGA and wafer bonding technology, etc.) to produce a variety of sensors, actuators, drivers and micro-systems with excellent performance, low price and miniaturization. Micro-electromechanical system (MEMS) is a new interdisciplinary technology developed in recent years, which will have a revolutionary impact on human life in the future. It involves mechanics, electronics, chemistry, physics, optics, biology, materials and other disciplines.
The traditional gyroscope is mainly the use of the conservation of angular momentum principle, so it is mainly a rotating object, its axis of rotation does not change with the rotation of its bearing bracket. But micromechanical gyroscopes don't work that way, because it's not easy to use micromechanical technology to fabricate a rotatable structure on a silicon substrate. Micromechanical gyroscopes utilize the coriolis force, the tangential force applied to a rotating object in radial motion. Here's how to derive the coriolis force. Readers of the science of dynamics should have no difficulty in understanding it.
Micromechanical gyroscopes may be designed and work in a variety of ways, but open micromechanical gyroscopes use the concept of angular velocity sensing of vibrating objects. Micromachined gyroscopes, which use vibrations to induce and detect coriolis forces, have no rotating parts and do not require bearings, and have been shown to be mass produced using micromachining techniques.
Most micromechanical gyroscopes rely on alternating coriolis forces caused by orthogonal vibrations and rotations. Vibrating objects are suspended from the base by a flexible elastic structure. The overall dynamic system is a two-dimensional elastic damped system in which vibration and rotation induced coriolis forces transfer energy proportional to angular velocity to the sensing mode.
Micromechanical gyroscopes, used to measure the speed of a car's rotation (turning or rolling), form an active control system with a low accelerometer. The so-called active control system is once the abnormal state of the car is found, the system corrects the abnormal state in time or correctly deals with the abnormal state to prevent the occurrence of the car accident. When cornering, for example, the system measures angular velocity through a gyroscope to see if the steering wheel is hitting too hard or not hard enough, and actively applies appropriate brakes on the inside or outside wheels to prevent the car from leaving the lane. Now the system is mainly installed in high-end cars.
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