Micromechanical MEMS is the abbreviation of English Micro Electro Mechanical systems, namely microelectromechanical systems. Microelectromechanical systems (MEMS) technology is a 21st century cutting-edge technology based on micro/nanotechnology. It refers to the technology of designing, processing, manufacturing, measuring and controlling micro/nano materials. It integrates mechanical components, optical systems, drive components, and electronic control systems into a single unitary micro system. Such a microelectromechanical system is capable of not only acquiring, processing and transmitting information or instructions, but also acting autonomously or according to external instructions in accordance with the acquired information. It uses a combination of microelectronics and micromachining technology (including silicon micromachining, silicon surface micromachining, LIGA and wafer bonding) to create a variety of high performance, low cost, miniaturized sensors. Actuators, drives, and microsystems. Microelectromechanical systems (MEMS) is a new multidisciplinary technology developed in recent years that will revolutionize human life in the future. It involves many disciplines such as mechanics, electronics, chemistry, physics, optics, biology, and materials.
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