MEMS sensors, Microelectro Mechanical Systems, are the frontier research fields of multidisciplinary research based on microelectronics technology. After more than 40 years of development, it has become one of the major scientific and technological fields in the world. It involves many disciplines and technologies such as electronics, mechanics, materials, physics, chemistry, biology, medicine, etc., and has broad application prospects. As of 2010, there are more than 600 units in the world engaged in the research and production of MEMS. Hundreds of products including micro pressure sensors, accelerometers, micro inkjet printheads, and digital micromirror monitors have been developed. Among them, MEMS sensors account for a considerable proportion. MEMS sensors are new sensors manufactured using microelectronics and micromachining technology. Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and intelligentization. At the same time, the feature size on the order of micrometers makes it possible to perform functions not possible with some conventional mechanical sensors.
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