Semiconductor pressure resistor
The semiconductor piezoresistive diffusion pressure sensor forms a semiconductor deformation pressure on the surface of the sheet, deforms the sheet by an external force (pressure) to generate a piezoresistive effect, thereby converting the change in impedance into an electric signal.
Capacitance type pressure sensor
A capacitance type pressure sensor forms a capacitance by opposing a fixed pole of a glass and a movable pole of silicon, and converts a change in the capacitance generated by the deformation of the movable pole by an external force (pressure) into an electrical signal. (E8Y's operating principle is electrostatic capacity, other models use semiconductors).
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