Modern science and technology requires cheaper acceleration sensor, with superior performance, easy to mass production. In the fields such as military, space systems, scientific measurement, you need to use the small volume, light weight, stable performance of the acceleration sensor. In the traditional processing method of manufacturing the acceleration sensor is difficult to fully meet these requirements. So the application of emerging micro mechanical processing technology, micro acceleration sensor arises at the historic moment. This kind of sensor is small in size, light weight, small power consumption, quick start, low cost, high reliability and easy to implement the digital and intelligent. Moreover, due to the micro mechanical structure making precision, good repeatability, easy integration, suitable for mass production, its cost performance is very high. Foresee in the near future, it will be dominant in the acceleration sensor market.